Titre | Atomic force microscope–force mapping and profiling on a sub 100Å scale |
Publication Type | Journal Article |
Year of Publication | 1987 |
Authors | Martin, Y., C. C. Williams, and H. K. Wickramasinghe |
Journal | Journal of Applied Physics |
Volume | 61 |
Issue | 10 |
Pagination | 4723 |
Date Published | 01/1987 |
ISSN | 00218979 |
Résumé | A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip‐sample distance range of 30–150Å. As an application, the force signal is used to maintain the tip‐sample spacing constant, so that profiling can be achieved with a spatial resolution of 50Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material‐dependent information from surfaces of electronic materials. |
DOI | 10.1063/1.338807 |
Short Title | J. Appl. Phys. |