| Titre | Atomic force microscope–force mapping and profiling on a sub 100Å scale |
| Publication Type | Journal Article |
| Year of Publication | 1987 |
| Authors | Martin, Y., C. C. Williams, and H. K. Wickramasinghe |
| Journal | Journal of Applied Physics |
| Volume | 61 |
| Issue | 10 |
| Pagination | 4723 |
| Date Published | 01/1987 |
| ISSN | 00218979 |
| Résumé | A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip‐sample distance range of 30–150Å. As an application, the force signal is used to maintain the tip‐sample spacing constant, so that profiling can be achieved with a spatial resolution of 50Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material‐dependent information from surfaces of electronic materials. |
| DOI | 10.1063/1.338807 |
| Short Title | J. Appl. Phys. |