Atomic force microscope–force mapping and profiling on a sub 100Å scale

TitreAtomic force microscope–force mapping and profiling on a sub 100Å scale
Publication TypeJournal Article
Year of Publication1987
AuthorsMartin, Y., C. C. Williams, and H. K. Wickramasinghe
JournalJournal of Applied Physics
Volume61
Issue10
Pagination4723
Date Published01/1987
ISSN00218979
Résumé

A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip‐sample distance range of 30–150Å. As an application, the force signal is used to maintain the tip‐sample spacing constant, so that profiling can be achieved with a spatial resolution of 50Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material‐dependent information from surfaces of electronic materials.

DOI10.1063/1.338807
Short TitleJ. Appl. Phys.